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Shvoong Home>Science>Effect of Substrate Surface Appearance on the Adhesion of Cr Films Deposited by D.C Magnetron Sputte Summary

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Effect of Substrate Surface Appearance on the Adhesion of Cr Films Deposited by D.C Magnetron Sputte

Article Abstract by: TsingHua    

Original Author: Journal of Sichuan University (Engineering Science Edition)
The chromium thin films was deposited by D.C magnetron sputtering on the substrates of zirconium alloy and the adhesion
of the chromium film to zirconium alloy substrate surface was studied. The substrates of samples (Ⅰ,Ⅱ,Ⅲ,Ⅳ) pretreated were respectively as follows: polished mechanically; unpolished; polished mechanically and argon ion bombardment for 10 min; polished mechanically and argon ion bombardment for 20 min. By SEM observation of the interface of Cr/Zr and scratch adhesion tests, its was found that interface of Cr/Zr is wellknit and there is a visible boundary; bond strengths of all samples are more than 20 N. It was concluded that the macro-roughness of substrate surface has few effect on the adhesion, and that roughening the substrate surface slightly is good for the adhesion.Ions bombardment prior to sputtering improves the adhesion, but it is useless if the bombarding time is too long; Difference of the samples adhesion comes from the microcosmic roughness of substrate surface and its mechanical clasping force. 
Published: March 28, 2003
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