Negative bias and
substrate temperature were adjusted to deposit
TiN film with best adhesion. Through adjusting gas flow rate of N2 and C2H2,, three kinds of Ti(C,N)/TiN multi-element-layer thin films were deposited on
aluminium alloy substrate. Their mechanical and tribological properties were investigated. The results indicated that increase of C2H2 flow led to increasing content of C in Ti(C,N)
layer and hardness of the film. But, at the same time, it resulted in decrease of
toughness and increase of roughness of the film when the whole flow of C2H2 and N2 was constant. When the whole thickness was almost unchanged , and layer number was increased, the grains of film became fine ,hardness
increased and toughness improved. When the C2H2 flow of 1# film was proper and its layer number was maximum, its toughness and
wear resistance were best, its average critical load was 76N, its microhardness reached 1911HV0.1 and its wear resistance increased by 11 times compared with that of the substrate.
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