In the manufacturing process of satellite solar panel substrate,the planeness of solar panel substrate is one of the important
performance indexex.Because of the particularity of surface structure of solar panel substrate,the classical measuring methods can not satisfy the requirements of planeness measurement.A new type of solar panel substrate planeness measuring system is introduced in this paper,and the
calibration method has been studied thoroughly.The total steps of the actual calibration process and the calibration results curve are given in this paper.It proves that the displacement along X axis in 2D Image Coordinates System of the centroidal of light spot image is near ideal linear with the height increment of measured object.The corresponding slope
coefficient of linear least square fitting line is the calibration coefficient of the measuring system.And it is the main reason that the measuring system can measure the relative height increment.In order to verify the precision and reliability of the measuring system,the static measuring comparison experiment have been done.It indicates that the measuring error is smaller than 13μm(RMS),and the results show that the measuring precision of the measuring system can satisfy the requirements of actual measurement.